“Double” displacement Talbot lithography: fast, wafer-scale, direct-writing of complex periodic nanopatterns
نویسندگان
چکیده
منابع مشابه
Talbot lithography: Self-imaging of complex structures
The authors present a self-imaging lithographic technique, capable of patterning large area periodic structures of arbitrary content with nanoscale resolution. They start from the original concept of Talbot imaging of binary gratings—and introduce the generalized Talbot imaging GTI where periodic structures of arbitrary shape and content form high-definition self-images. This effect can be used...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2019
ISSN: 1094-4087
DOI: 10.1364/oe.27.032037